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Specification
Item Silicon Substrate
Diameter 300.0±0.3mm
Thickness 775±25μm
Oxide layer thickness 500nm
Surface Finish DSP Double-sided oxide
Surface Orientation <100>
Crystal Growth Method CZ
Dopant N-type / P-type
Primary Flat Length Notch
Resistivity 1~100Ω·cm/<0.01Ω·cm
TTV ≤30μm
BOW ≤45μm
WARP ≤60μm
Edge Exclusion ≤3 mm


Customization specifications:

* Various sizes and shapes such as 10*10mm

* Various thicknesses: 0.1~20mm

* Various surface roughness such as slicing,lapping,polishing.

* Silicon crystal ingots are available.


Properties
Silicon Substrate
Crystal Structure Diamond cubic crystal
Band-gap Width (eV) 1.12 eV
Melting Point (°C) 1414 °C
Mohs Hardness 7
Thermal Conductivity (W·cm⁻¹·°C⁻¹) 1.5 W·cm⁻¹·°C⁻¹
Thermal Expansion Coefficient (°C⁻¹) 2.5×10⁻⁶
Lattice Constant (nm) a=0.5431
Electron Mobility (cm²·V⁻¹·s⁻¹) 1350
Breakdown Electric Field (MV·cm⁻¹) 0.3
JFM Index (power) 1
BFM Index (SW) 1
BHFM Index (RF) 1
Refractive Index 3.5
SKU: --
12 inch Silicon oxide wafer
Thickness
  • 350μm
  • 1000μm
  • 3000μm
Pieces
  • 1pcs
  • 15pcs
  • 100pcs
Stock: 89999991
Quantity
$11.00 ~ 99.00

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DESCRIPTION
12‑inch thermal‑grown silicon oxide wafer consists of monocrystalline silicon substrate with high‑quality thermally‑formed SiO₂ dielectric layer. Available in Double‑Side Polished (DSP), with double‑sided thermal oxide. Oxide thickness, wafer thickness, crystal orientation <100>/<111>, resistivity and doping type (P‑type / N‑type / intrinsic) can be fully customized. Designed for advanced semiconductor process development, MEMS, thin‑film deposition, wafer bonding and high‑end lab research. Please contact us for detailed specifications and quotation.
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