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Specification

Top Silicon layer

Thickness 220±10nm
Surface Orientation <100>
Crystal Growth Method CZ
Dopant N-type / P-type


Buried oxider

Thickness 2000±50 nm


Handle Substrate

Diameter 150.0±0.3mm
Thickness >300μm
Surface Orientation <100>
Crystal Growth Method CZ
Dopant N-type / P-type
Primary Flat Length 47.5±1mm
Resistivity 1~100Ω·cm/<0.01Ω·cm
Backside Surface Polished+Oxide
TTV ≤5μm
BOW ≤35μm
WARP ≤45μm
Edge Exclusion ≤3 mm


Customization specifications:

* Various sizes and shapes such as 10*10mm

* Various thicknesses: 0.1~20mm

* Various surface roughness such as slicing,lapping,polishing.

* Silicon crystal ingots are available.

SKU: --
6 inch Silicon-On-Insulator (SOI)
Thickness
  • 350μm
  • 1000μm
  • 3000μm
Pieces
  • 1pcs
  • 15pcs
  • 100pcs
Stock: 89999991
Quantity
$11.00 ~ 99.00

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DESCRIPTION
Our 6‑inch SOI (Silicon‑On‑Insulator) wafers are high‑quality three‑layer substrates. The thin top monocrystalline silicon device layer is electrically isolated from handle wafer via buried oxide (BOX) layer. Custom options: top‑silicon thickness, BOX layer thickness, crystal orientation <100>/<111>, resistivity, P‑type / N‑type doping. PD‑SOI and FD‑SOI configurations are available. Thanks to low parasitic capacitance, complete latch‑up immunity, low crosstalk and excellent radiation hardness, these 6‑inch SOI wafers fit for pilot‑scale MEMS sensor fabrication, RF circuit development, mixed‑signal chips and industrial semiconductor research. Custom dicing service is supported. Send your target specs for precise quotation.
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